All / Sputtering Targets / Silicon (Si) 5N (99.999%) All Evaporation Materials Sputtering Targets Aluminium (Al) 5N (99.999%) Copper (Cu) 4N5 (99.995%) Silicon (Si) 5N (99.999%) Substrates & Wafers Silicon (Si) 5N (99.999%) Sputtering Target, 2" dia x 0.125" thick $119.00 Add To Cart Silicon (Si) 5N (99.999%) Sputtering Target, 3" dia x 0.125" thick $259.00 Add To Cart