All / Sputtering Targets Aluminium (Al) 5N (99.999%) | Copper (Cu) 4N5 (99.995%) | Silicon (Si) 5N (99.999%) | All Evaporation Materials Sputtering Targets Aluminium (Al) 5N (99.999%) Copper (Cu) 4N5 (99.995%) Silicon (Si) 5N (99.999%) Substrates & Wafers Aluminum (Al) 5N (99.999%) Sputtering Target, 2" dia x 0.25" thick $95.99 Add To Cart Copper (Cu) 4N5 (99.995%) Sputtering Target, 2" dia x 0.25" thick $87.99 Add To Cart Silicon (Si) 5N (99.999%) Sputtering Target, 2" dia x 0.125" thick $119.00 Add To Cart Silicon (Si) 5N (99.999%) Sputtering Target, 3" dia x 0.125" thick $259.00 Add To Cart